ISO Vacuum Bellows

ISO Vacuum Bellows

ISO Vacuum Bellows

Applications of ISO Vacuum Bellows

1. Movement Compensation:

   • Thermal Expansion: Compensates for dimensional changes in piping and chambers due to temperature fluctuations during bake-out or process cycles.

   • Mechanical Alignment: Corrects minor misalignments between connected components (e.g., between a pump and a chamber port) during installation, simplifying assembly.

2. Vibration and Noise Damping:

   • Isolation: Isolates sensitive equipment (such as analytical instruments, microscopes, or precision stages) from vibrations generated by pumps, compressors, or other machinery.

   • Structural Decoupling: Prevents the transmission of noise and mechanical stress through the vacuum system, protecting delicate processes.

3. Linear and Angular Motion Feedthroughs:

   • Manipulator Integration: Serves as the flexible vacuum boundary for linear, rotary, or XYZ manipulators, allowing sample positioning or tool movement inside the chamber without breaking vacuum.

   • Precision Positioning: Used in stages for semiconductor fabrication, beamline components in synchrotrons, and other applications requiring controlled motion under vacuum.

4. Connection to Sensitive or Moving Components:

   • Gapless Coupling: Connects components where a rigid connection is impractical, such as between a fixed chamber and a dynamically positioned ion gauge, mass spectrometer, or viewport.

   • Valve Integration: Often integrated with or mounted to valves to provide flexibility and stress relief in the piping system.

Key Advantages of ISO Vacuum Bellows

1. Standardized Compatibility:

   • The ISO flange interface (e.g., ISO-KF, ISO-F, CF) guarantees direct, leak-tight connection to standard vacuum components worldwide, ensuring easy sourcing, interchangeability, and system design.

2. Superior Vacuum Integrity:

   • Constructed from high-quality, low-outgassing materials like stainless steel (AISI 304, 316L) and employing advanced welding techniques (e.g., TIG, electron beam), they maintain ultra-high vacuum conditions with minimal virtual leaks and outgassing.

3. High Flexibility and Durability:

   • The convoluted design provides excellent flexibility in compression, extension, and lateral offset while maintaining structural integrity and resisting fatigue from repeated cycling or pressure differentials.

4. Minimal Maintenance and High Reliability:

   • As a sealed, metal component, they require no maintenance, offer a long service life, and provide consistent performance without the degradation or permeation issues associated with elastomeric seals or plastic hoses.

5. System Protection:

   • By absorbing stresses, they prevent damaging loads from being transferred to expensive and delicate vacuum components (like flanges, viewports, or sensors), reducing the risk of system failure and costly downtime.

6. Process Stability:

   • Their ability to dampen vibration and compensate for thermal changes contributes directly to the stability and precision of sensitive vacuum processes in research, semiconductor, and analytical applications.