Long length KFF vacuum bellows

Long-length KFF vacuum bellows

Long-length KFF vacuum bellows

Primary Applications

These bellows are critical in advanced vacuum systems where large movements must be sealed:

1. Particle Accelerators & Synchrotron Light Sources:

   • Use: Connecting extremely long beamline vacuum chambers to compensate for thermal expansion and seismic or settlement-induced displacements.

2. Semiconductor Fabrication Equipment:

   • Use: Interfacing between wafer transfer chambers, process modules, and load locks. They compensate for thermal drift and alignment tolerances, ensuring precise robotic wafer handling while maintaining UHV conditions.

3. Vacuum Furnaces & Metallurgy:

   • Use: Connecting furnace sections or the furnace to feeding mechanisms. They absorb the massive thermal expansion during heating/cooling cycles, preventing structural stress.

4. Large Space Simulation Chambers:

   • Use: Providing a flexible, sealed connection between massive vacuum chambers and their pumping systems or auxiliary ports, accommodating structural flex and vibration.

5. Precision Analytical Instruments:

   • Use: In systems like electron microscopes (TEM/SEM) or mass spectrometers, allowing for adjustable positioning of stages, apertures, or sample introductions without breaking vacuum.

6. Vacuum Robotic Actuators:

   • Use: Serving as a flexible “wrist” or translation seal for robotic arms inside vacuum, allowing extensive movement while maintaining the pressure barrier between the atmosphere (at the drive end) and the vacuum.

7. Vibration Isolation & Special Connections:

   • Use: Decoupling two pieces of equipment (e.g., a sensitive analyzer from a noisy pump) to dampen vibration transfer. Also used to connect two large, independently supported vacuum vessels that may shift relative to each other.

Long-length KFF vacuum bellows